Custom Rotary Union Project: FC-05016
Industry: SemiconductorMedia Type(s): OtherEnvironment: CleanroomMaterial: Stainless SteelMax. Pressure(s): VacuumMax. Speed: 200 RPM
Number of Passages: 6Passage Size(s): .158" [4 mm]Through Bore: NoneDiameter: 2.165" [55 mm]Length: 7.059" [179.3 mm]
6 passage rotary union designed for a CMP wafer grinding and polishing application. Customer specified design featuring an independent unit for slurry media for ease of servicing.