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Custom Rotary Union Project: FC-05016

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  • Industry: Semiconductor
    Media Type(s): Other
    Environment: Cleanroom
    Material: Stainless Steel
    Max. Pressure(s): Vacuum
    Max. Speed: 200 RPM
  • Number of Passages: 6
    Passage Size(s): .158" [4 mm]
    Through Bore: None
    Diameter: 2.165" [55 mm]
    Length: 7.059" [179.3 mm]

Description

6 passage rotary union designed for a CMP wafer grinding and polishing application. Customer specified design featuring an independent unit for slurry media for ease of servicing.

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