Industry Solutions Semiconductor
We provide fluid sealing solutions that help semiconductor leaders produce some of the world's ultra-thin, cutting-edge silicon wafers.
Semiconductor manufacturing environments demand non-contaminating integration with strict requirements for maintaining high levels of accuracy and performance. DSTI is a world-class provider of precision fluid rotary union solutions for the semiconductor industry. We offer exclusive design advantages that meet the stringent requirements demanded by CMP and automation systems.
Fluid Sealing Solutions
Fluid Sealing Solutions Chemical Mechanical Planarization (CMP) Systems
Designed for cleanroom environments, DSTI's high-precision and compact rotary unions provide a reliable fluid transfer solution for a variety of mechanical polishing operations. Specialized sealing technology capable of handling abrasive and corrosive media, and a wide range of temperatures ensure a long service life reducing CMP system downtime.
Fluid Sealing Solutions Semiconductor Manufacturing Automation & Robotics
DSTI's high-performance, specialized fluid sealing solutions play an integral role in the automated manufacturing of silicon wafers. Our team of experienced engineers work directly with you to develop a solution designed to meet your application's exact requirements for performance, cost, and delivery.
In-House Capabilities & Services
From design to delivery to in-field product service and support, our dedicated team will be involved at every step in helping you reach your project goals.
Engineering & Simulation
DSTI's Engineering team leverages years of experience and a deep knowledge of engineering ...
Learn MoreProject Management
Regardless of the scale or complexity of a project, our Project Management team will ensur...
Learn MoreCNC Precision Machining
DSTI's advanced CNC machining centers offer the highest in quality, speed and consistency....
Learn MoreWelding & Fabrication
DSTI's certified welding team specializes in complex structural assemblies and high pressu...
Learn MoreAssembly, Testing & Qualification
All products are assembled and tested by DSTI's team of trained technicians using custom d...
Learn MoreInspection & Quality Management
With cutting edge products in nearly every industry, DSTI's Inspection and Quality team mo...
Learn MoreRecent Projects
Providing custom solutions is what we do best! Explore DSTI's wide-ranging experience in custom fluid sealing solutions by using the recent projects filter below.
- Vacuum
- 0 - 199 PSI [0 - 14 BAR]
- 200 - 6,499 PSI [14 - 448 BAR]
- 6,500 PSI [448 BAR] & Over
- 0 - 24 RPM
- 25 - 99 RPM
- 100 RPM & Over
- 1 Passage
- 2 Passages
- 3 Passages
- 4 - 5 Passages
- 6 - 7 Passages
- 8 - 12 Passages
- 13 Passages & Over
- None
- Under 0.125" [3.18 mm]
- 0.125" - 0.249" [3.18 mm - 6.32 mm]
- 0.250" - 0.374" [6.35 mm - 9.50 mm]
- 0.375" - 0.499" [9.53 mm - 12.67 mm]
- 0.500" - 0.749" [12.70 mm - 19.02 mm]
- 0.750" - 0.999" [19.05 mm - 25.37 mm]
- 1.000" - 1.999" [25.40 mm - 50.77 mm]
- 2.000" [50.80 mm] & Over
- Chemical
- Coolant
- Cryogenics
- Food-Grade
- Gas
- Mud
- Oil
- Steam
- Water
- Other
- Aluminum
- Brass
- Bronze
- Carbon / Alloy Steel
- Stainless Steel
- Other
- Under 1" [25.4 mm]
- 1.0" - 2.9" [25.4 mm - 73.7 mm]
- 3.0" - 5.9" [76.2 mm - 149.9 mm]
- 6.0" - 9.9" [152.4 mm - 251.5 mm]
- 10.0" - 11.9" [254.0 mm - 302.3 mm]
- 12.0" - 23.9" [304.8 mm - 607.1 mm]
- 24.0" - 35.9" [609.6 mm - 911.9 mm]
- 36" [914.4 mm] & Over
- None
- Crosstalk Protection
- Drive Mechanism
- Encoder / Rotary Sensor
- Explosion Proof
- External Cooling
- Fiber Optic Joint
- Load Bearing
- Slip Ring
- Value Added Components
- Atmosphere / Space
- Cleanroom
- Explosive
- Indoor
- Offshore
- Outdoor
- Washdown
- Aerospace
- Alternative Energy
- Heavy Equipment
- Defense
- Factory Automation
- Food & Beverage
- Machine Tool
- Marine
- Medical
- Metal Production
- Oil & Gas
- Plastic Molding
- Semiconductor