Custom Rotary Union Project: EF-0930004
Industry: SemiconductorMedia Type(s): Gas, WaterEnvironment: CleanroomMaterial: Aluminum, Stainless SteelMax. Pressure(s): 218 PSI [15 BAR]Max. Speed: 190 RPM
Number of Passages: 4Passage Size(s): 0.310" [7.9 mm], 0.550" [14 mm]Through Bore: NoneDiameter: 7.990" [202.9 mm]Length: 6.000" [152.4 mm]
4 passage rotary union designed for a semiconductor wafer cooling process. Features include a customer-specified design for water, air, and vacuum service with a 20-circuit integrate electrical slip ring. Specialized components and seals to meet long-life (30 million revolutions) requirements.