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Custom Rotary Union Project: EF-0930004

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  • Industry: Semiconductor
    Media Type(s): Gas, Water
    Environment: Cleanroom
    Material: Aluminum, Stainless Steel
    Max. Pressure(s): 218 PSI [15 BAR]
    Max. Speed: 190 RPM
  • Number of Passages: 4
    Passage Size(s): 0.310" [7.9 mm], 0.550" [14 mm]
    Through Bore: None
    Diameter: 7.990" [202.9 mm]
    Length: 6.000" [152.4 mm]

Description

4 passage rotary union designed for a semiconductor wafer cooling process. Features include a customer-specified design for water, air, and vacuum service with a 20-circuit integrate electrical slip ring. Specialized components and seals to meet long-life (30 million revolutions) requirements.

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