Custom Rotary Union Project: CB-0800104

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  • Industry: Semiconductor
    Media Type(s): Gas
    Environment: Cleanroom, Indoor
    Material: Stainless Steel
    Max. Pressure(s): 14 PSI [1 BAR]
    Max. Speed: 200 RPM
  • Number of Passages: 4
    Passage Size(s): .125" [3.2 mm]
    Through Bore: None
    Diameter: 1.88" [47.8 mm]
    Length: 5.01" [127.3 mm]


4-passage rotary union designed to supply vacuum and nitrogen gas to a CMP wafer polishing machine. Features include a specialized shaft coating resulting in a hard, slippery, and corrosion-resistant surface for reduced maintenance and rebuild costs.

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