Custom Rotary Union Project: BQ-1860002

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  • Industry: Semiconductor
    Media Type(s): Cryogenics, Gas
    Environment: Cleanroom, Indoor
    Material: Stainless Steel
    Max. Pressure(s): 100 PSI [7 BAR]
    Max. Speed: 60 RPM
  • Number of Passages: 2
    Passage Size(s): .125" [3.2 mm]
    Through Bore: None
    Diameter: 2.54" [64.5 mm]
    Length: 3.50" [88.9 mm]


2-passage rotary union designed to supply nitrogen gas (-274°F) to a semiconductor wafer polishing machine located within a vacuum chamber. Features include a specialized shaft coating resulting in a hard, slippery and corrosion-resistant surface for reduced maintenance and rebuild costs.

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