Custom Rotary Union Project: BQ-1860002
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Industry: SemiconductorMedia Type(s): Cryogenics, GasEnvironment: Cleanroom, IndoorMaterial: Stainless SteelMax. Pressure(s): 100 PSI [7 BAR]Max. Speed: 60 RPM
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Number of Passages: 2Passage Size(s): .125" [3.2 mm]Through Bore: NoneDiameter: 2.54" [64.5 mm]Length: 3.50" [88.9 mm]
Description
2-passage rotary union designed to supply nitrogen gas (-274°F) to a semiconductor wafer polishing machine located within a vacuum chamber. Features include a specialized shaft coating resulting in a hard, slippery and corrosion-resistant surface for reduced maintenance and rebuild costs.
