Custom Rotary Union Project: BJ-05413

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  • Industry: Semiconductor
    Media Type(s): Gas, Water
    Environment: Cleanroom
    Material: Stainless Steel
    Max. Pressure(s): 80 PSI [6 BAR]
    Max. Speed: 650 RPM
  • Number of Passages: 3
    Passage Size(s): .187" [4.7 mm]
    Through Bore: None
    Diameter: 2.687" [68.2 mm]
    Length: 5.199" [132.1 mm]


3 passage rotary union designed for a semiconductor deposition machine application. Features integrated mechanical seals for water service, specialized lip seals for air service and crosstalk protection.

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