Custom Rotary Union Project: BJ-05413
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Industry: SemiconductorMedia Type(s): Gas, WaterEnvironment: CleanroomMaterial: Stainless SteelMax. Pressure(s): 80 PSI [6 BAR]Max. Speed: 650 RPM
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Number of Passages: 3Passage Size(s): .187" [4.7 mm]Through Bore: NoneDiameter: 2.687" [68.2 mm]Length: 5.199" [132.1 mm]
Description
3 passage rotary union designed for a semiconductor deposition machine application. Features integrated mechanical seals for water service, specialized lip seals for air service and crosstalk protection.