View Part:
BJ-05413
-
Industry:
Semiconductor -
# of Passages:
3 -
Passage Size:
0.125 - 0.249 -
Rotation Speed (RPM):
100 & Over -
Pressure (PSI):
0 - 199 -
Media:
Gas
Water -
Material:
Stainless Steel -
Thru Bore:
None -
Environment:
Cleanroom -
Options:
Crosstalk Protection
Exact Specifications
- # of Passages: 3
- Passage Size: .187"
- Rotational Speed (RPM): 650 RPM
- Pressure (PSI): 80 PSI
- Thru Bore Size: N/A
- Diameter: 2.687"
- Length: 5.199"
Additional Information
3 passage rotary union designed for a semiconductor deposition machine application. Features integrated mechanical seals for water service, specialized lip seals for air service and crosstalk protection.
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