Optimized for cleanroom environments, DSTI rotary unions reduce downtime and enhance equipment life.
Semiconductor
Rotary Unions & Swivel Joints for Semiconductor Applications
Industry PDF
Semiconductor manufacturing labs demand non-contaminating integration with strict requirements for maintaining high levels of accuracy and performance. DSTI is dedicated to the success of their customers by being a world-class provider of innovative rotary union solutions for the semiconductor industry. DSTI offers distinct design advantages due to their dedication exclusively to rotary union design & manufacturing. Designs include:
- Compact rotary unions for miniature robotic arm actuator applications
- Rotary unions for CMP wafer polishing and grinding system applications
Examples
Displaying 6 of 9
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- Industry: Semiconductor
- # of Passages: 4 - 5
- Passage Size: 0.250 - 0.374
- Rotation Speed (RPM): 100 & Over
- Pressure (PSI): 0 - 199
- Media: Gas
- Industry: Semiconductor
- # of Passages: 1
- Passage Size: 0.125 - 0.249
- Rotation Speed (RPM): 25 - 99
- Pressure (PSI): 0 - 199
- Media: Gas
- Industry: Semiconductor
- # of Passages: 3
- Passage Size: 0.125 - 0.249
- Rotation Speed (RPM): 25 - 99
- Pressure (PSI): 0 - 199
- Media: Water
- Industry: Semiconductor
- # of Passages: 4 - 5
- Passage Size: Under 0.125
- Rotation Speed (RPM): 25 - 99
- Pressure (PSI): 0 - 199
- Media: Gas
- Industry: Semiconductor
- # of Passages: 3
- Passage Size: 0.125 - 0.249
- Rotation Speed (RPM): 0 - 24
- Pressure (PSI): 0 - 199
- Media: Water
- Industry: Semiconductor
- # of Passages: 6 - 7
- Passage Size: 0.125 - 0.249
- Rotation Speed (RPM): 100 & Over
- Pressure (PSI): Vacuum
- Media: Other
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